Semiconductor device having line-type trench to define active region and method of forming the same

• Main Authors: LEE, KYU-HYUN, CHOI, YOUNG-JIN, HUH, JU-YOUNG, JANG, MI-JEONG, CHOI, JAY-BOK
• Format: Patent
• Language: Chinese; English
• Published: 21.11.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device includes a plurality of parallel-trenches that are parallel to each other, a plurality of intersect-trenches that are parallel to each other, a plurality of active regions that are confined by the parallel-trenches and the intersect-trenches, a plurality of lower conductive li...