Determining thin film stack functional relationships for measurement of chemical composition

• Main Author: YGARTUA, CARLOS L
• Format: Patent
• Language: Chinese; English
• Published: 01.06.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A method for determining chemical composition from optical properties of a stack formed with a process, by preparing test samples of the stack using known and intentional variations to the process to affect a variation in the chemical composition, measuring the optical properties of the test samples...