Determining thin film stack functional relationships for measurement of chemical composition
A method for determining chemical composition from optical properties of a stack formed with a process, by preparing test samples of the stack using known and intentional variations to the process to affect a variation in the chemical composition, measuring the optical properties of the test samples...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
01.06.2016
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Subjects | |
Online Access | Get full text |
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