Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots

Methods of correction of rotational and linear misalignment in multi-link robots are provided. The method allows for precise orientation of an end effector to put or pick substrates at a target destination by correcting for both positional and rotational orientation errors. The method rotates a boom...

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Bibliographic Details
Main Authors KREMERMAN, IZYA, COX, DAMON KEITH
Format Patent
LanguageChinese
English
Published 21.12.2015
Subjects
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