Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
Methods of correction of rotational and linear misalignment in multi-link robots are provided. The method allows for precise orientation of an end effector to put or pick substrates at a target destination by correcting for both positional and rotational orientation errors. The method rotates a boom...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
21.12.2015
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Subjects | |
Online Access | Get full text |
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