Apparatus for planarizing a probe card and method
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.11.2011
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Subjects | |
Online Access | Get full text |
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Author | FOSTER, CRAIG Z WAKEFIELD, RAY |
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RelatedCompanies | NEXTEST SYSTEMS CORPORATION |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING |
Title | Apparatus for planarizing a probe card and method |
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