Lithographic apparatus and method to detect correct clamping of an object
Disclosed is a lithographic apparatus (1) comprising a support structure (MT; WT) adapted to clamp an object (W; MA; 5). The support structure (MT; WT) and the object (W; MA; 5) clamped thereon define a compartment. Supply means (11) are connected to the compartment and supply a fluid to the compart...
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Main Author | |
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Format | Patent |
Language | English |
Published |
11.03.2007
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Subjects | |
Online Access | Get full text |
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Summary: | Disclosed is a lithographic apparatus (1) comprising a support structure (MT; WT) adapted to clamp an object (W; MA; 5). The support structure (MT; WT) and the object (W; MA; 5) clamped thereon define a compartment. Supply means (11) are connected to the compartment and supply a fluid to the compartment. The supply means (11) comprise a meter (15) to measure a change in at least one of flow velocity of the fluid and pressure of the fluid. |
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Bibliography: | Application Number: TW200493102769 |