Processing system and method for treating a substrate
A processing system and method for chemical oxide removal (COR), wherein the processing system comprises a first treatment chamber and a second treatment chamber, wherein the first and second treatment chambers are coupled to one another. The first treatment chamber comprises a chemical treatment ch...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
01.01.2006
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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