Monitoring resistor element and measuring method of relative preciseness of resistor elements

A monitoring resistor element includes a plurality of resistors (1, 2) formed on an integrated circuit chip through the same fabrication steps as those used to form a practical circuit are connected to power source pads (3, 4, 5, 6), which are terminal pads formed on the integrated circuit chip. A m...

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Main Author INOUE, ITARU
Format Patent
LanguageEnglish
Published 11.07.2003
Edition7
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Abstract A monitoring resistor element includes a plurality of resistors (1, 2) formed on an integrated circuit chip through the same fabrication steps as those used to form a practical circuit are connected to power source pads (3, 4, 5, 6), which are terminal pads formed on the integrated circuit chip. A method for measuring a relative preciseness of resistors (1, 2) formed on an integrated circuit chip includes the step of performing the relative preciseness of the resistors by using power source pads (3, 4, 5, 6), to which the resistors (1, 2) are connected and which are terminal pads formed on the integrated circuit chip, as measuring pads when the measurement of relative preciseness of the resistors (1, 2) is performed.
AbstractList A monitoring resistor element includes a plurality of resistors (1, 2) formed on an integrated circuit chip through the same fabrication steps as those used to form a practical circuit are connected to power source pads (3, 4, 5, 6), which are terminal pads formed on the integrated circuit chip. A method for measuring a relative preciseness of resistors (1, 2) formed on an integrated circuit chip includes the step of performing the relative preciseness of the resistors by using power source pads (3, 4, 5, 6), to which the resistors (1, 2) are connected and which are terminal pads formed on the integrated circuit chip, as measuring pads when the measurement of relative preciseness of the resistors (1, 2) is performed.
Author INOUE, ITARU
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Snippet A monitoring resistor element includes a plurality of resistors (1, 2) formed on an integrated circuit chip through the same fabrication steps as those used to...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
Title Monitoring resistor element and measuring method of relative preciseness of resistor elements
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