Systems for purging a carrier

A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through th...

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Main Authors FOSNIGHT, WILLIAM J, SHENK, JOSHUA W
Format Patent
LanguageEnglish
Published 11.08.2001
Edition7
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Abstract A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through the valve, and a second, open position where the poppet allows gas flow through the valve. In the absence of a pod on the support platform, pressurized gas from the gas source downstream of the valve biases the poppet into the first position to thereby block gas flow. In this first position, a top portion of the poppet extends slightly above the upper surface of the pod support platform. When a pod is seated on the support platform, the weight of the pod moves the poppet from its first position to its second position where gas is allowed to flow through the valve and into the pod to allow purging of the pod.
AbstractList A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through the valve, and a second, open position where the poppet allows gas flow through the valve. In the absence of a pod on the support platform, pressurized gas from the gas source downstream of the valve biases the poppet into the first position to thereby block gas flow. In this first position, a top portion of the poppet extends slightly above the upper surface of the pod support platform. When a pod is seated on the support platform, the weight of the pod moves the poppet from its first position to its second position where gas is allowed to flow through the valve and into the pod to allow purging of the pod.
Author FOSNIGHT, WILLIAM J
SHENK, JOSHUA W
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Snippet A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred...
SourceID epo
SourceType Open Access Repository
SubjectTerms ACTUATING-FLOATS
BASIC ELECTRIC ELEMENTS
BLASTING
COCKS
CONVEYING
DEVICES FOR VENTING OR AERATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HANDLING THIN OR FILAMENTARY MATERIAL
HEATING
LIGHTING
MECHANICAL ENGINEERING
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TAPS
THERMAL INSULATION IN GENERAL
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
VALVES
WEAPONS
Title Systems for purging a carrier
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