Monitoring system for dicing saws
A method and apparatus for accumulating dicing data for process analysis, monitoring process stability and cut quality in a substrate. The apparatus has a spindle motor with a blade attached to the spindle motor. A spindle driver is coupled the spindle to drive the spindle at a predetermined rotatio...
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| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
11.12.2000
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| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
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| Abstract | A method and apparatus for accumulating dicing data for process analysis, monitoring process stability and cut quality in a substrate. The apparatus has a spindle motor with a blade attached to the spindle motor. A spindle driver is coupled the spindle to drive the spindle at a predetermined rotation rate. A sensor is connected to the spindle motor to determine the rotation rate of the spindle. A controller is coupled to the monitor in order to control the spindle driver responsive to the load induced on the blade by the substrate. |
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| AbstractList | A method and apparatus for accumulating dicing data for process analysis, monitoring process stability and cut quality in a substrate. The apparatus has a spindle motor with a blade attached to the spindle motor. A spindle driver is coupled the spindle to drive the spindle at a predetermined rotation rate. A sensor is connected to the spindle motor to determine the rotation rate of the spindle. A controller is coupled to the monitor in order to control the spindle driver responsive to the load induced on the blade by the substrate. |
| Author | LICHT, ODED YEHOSHUA WEISSHAUS, ILAN |
| Author_xml | – fullname: LICHT, ODED YEHOSHUA – fullname: WEISSHAUS, ILAN |
| BookMark | eNrjYmDJy89L5WRQ9M3PyyzJL8rMS1coriwuSc1VSMsvUkjJTAaLJJYX8zCwpiXmFKfyQmluBnk31xBnD93Ugvz41OKCxOTUvNSS-JBwE0MTcxMzJydjwioA4tYnDg |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| Edition | 7 |
| ExternalDocumentID | TW414746BB |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_TW414746BB3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 15:36:25 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_TW414746BB3 |
| Notes | Application Number: TW199988118785 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20001211&DB=EPODOC&CC=TW&NR=414746B |
| ParticipantIDs | epo_espacenet_TW414746BB |
| PublicationCentury | 2000 |
| PublicationDate | 20001211 |
| PublicationDateYYYYMMDD | 2000-12-11 |
| PublicationDate_xml | – month: 12 year: 2000 text: 20001211 day: 11 |
| PublicationDecade | 2000 |
| PublicationYear | 2000 |
| RelatedCompanies | KULICKE & SOFFA INVESTMENTS |
| RelatedCompanies_xml | – name: KULICKE & SOFFA INVESTMENTS |
| Score | 2.5291173 |
| Snippet | A method and apparatus for accumulating dicing data for process analysis, monitoring process stability and cut quality in a substrate. The apparatus has a... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING WORKING CEMENT, CLAY, OR STONE WORKING STONE OR STONE-LIKE MATERIALS |
| Title | Monitoring system for dicing saws |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20001211&DB=EPODOC&locale=&CC=TW&NR=414746B |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQSTVLMwa2UpN1jYGFna5JoomBbpK5pZmuBbC2MzdPM0g2tABtFPb1M_MINfGKMI1gYkiH7YUBnxNaDj4cEZijkoH5vQRcXhcgBrFcwGsri_WTMoFC-fZuIbYuarDeMfjEMjUXJ1vXAH8Xf2c1Z2fbkHA1vyBbE0MTcxMzJ2YGVlAbGnTIvmuYE2hLSgFyfeImyMAWADQqr0SIgSk1T5iB0xl27ZowA4cvdLYbyIRmvGIRBkVI3gMNwilADl9WALY2FcAqgSKJ5cWiDPJuriHOHrpAu-LhvooPCYe6yclYjIEF2NdPlWBQME4CNhDMzFJMUo3TTBINgK2HZGBplGxhZmGebGZhliLJIIHLFCncUtIMXOAd5IZGuoaGMgwsJUWlqbLAurQkSQ4cDgAcRngh |
| link.rule.ids | 230,309,786,891,25594,76903 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV3dT4MwEL_MaZxvOjWbX8PE8NYIUlt8ICbACOpgi0G3NwIdGF-2RTD79z06UF_21lyb60dyH79r7wpwk7HcQC9VEAOVHaEJ1UjKHxgx0dpxnmtCN6tE4SBk_ht9nt3PWvDR5MLIOqFrWRwRJUqgvJdSX6_-gliufFtZ3KafSFo-epHlqg06lhXLVNe2hpOxO3ZUx7GiqRq-WlSnnDJ7B3Y54kGJk97tKiVl9d-eeIewN0FWi_IIWtmiCx2n-XatC_tBfduNzVrwimO43sheFYRTNsWXFfQ2FTkSKcm6OIGBN4wcn-Bc8e-u4mhar8k2TqGNWD_rgWKk6CAwNqeZkdNEQ-9BoDYSJjO5YCab96G3jcvZ9q4BdPwoGMWjp_DlHA5kNrl-R3T9Atrl13d2iXa1TK_kmfwA32V7Cw |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Monitoring+system+for+dicing+saws&rft.inventor=LICHT%2C+ODED+YEHOSHUA&rft.inventor=WEISSHAUS%2C+ILAN&rft.date=2000-12-11&rft.externalDBID=B&rft.externalDocID=TW414746BB |