Micro blower

A micro blower includes a base metal sheet, a flowing channel layer, a sandwich metal sheet, a capping layer and two first piezoelectric vibrators. The flowing channel layer is connected to the top of the base metal sheet and including a first chamber, a second chamber, an inlet channel, a linking c...

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Bibliographic Details
Main Authors PANGESTU, RENO, LIN, SHEUAN-PERNG, YU, CHIH-HSUAN, TING, YUNG
Format Patent
LanguageChinese
English
Published 01.01.2024
Subjects
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