Micro blower
A micro blower includes a base metal sheet, a flowing channel layer, a sandwich metal sheet, a capping layer and two first piezoelectric vibrators. The flowing channel layer is connected to the top of the base metal sheet and including a first chamber, a second chamber, an inlet channel, a linking c...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.01.2024
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Subjects | |
Online Access | Get full text |
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