High resistivity, high corrosion resistance ceramic material and wafer placement table
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass%.
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.10.2023
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Subjects | |
Online Access | Get full text |
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