Methods and mechanisms for process recipe optimization

• Main Author: PACK, ROBERT C
• Format: Patent
• Language: Chinese; English
• Published: 01.09.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES

An electronic device manufacturing system configured to performing, by manufacturing equipment, a first process on a first substrate according to a process recipe, wherein the process recipe comprises a plurality of setting parameters. The system then generates metrology data associated with a plurality of features and inputs the metrology data into one or more Bayesian probabilistic models. The system then receives an output from the one or more Bayesian probabilistic models based on the metrology data and at least one settings parameter of the plurality of setting parameters. The system then updates, based on the output of the one or more Bayesian probabilistic models, the process recipe by modifying at least one setting parameter of the plurality of setting parameters, and performs, by the manufacturing equipment, a second process on a second substrate according to the updated process recipe.