Method and apparatus for imaging nonstationary object
Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.09.2022
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Subjects | |
Online Access | Get full text |
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Abstract | Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating from the illuminated area of the object; an image sensor configured to capture an image formed by the at least one signal beam collected by the objective lens; and a motion compensatory mechanism operable to compensate for relative motion of the stage module with respect to the objective lens during an image acquisition. The motion compensatory mechanism causes a compensatory motion of one or more of: said objective lens or at least one optical element thereof; said image sensor; and/or an optical element comprised within a detection branch and/or illumination branch of the optical imaging system. |
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AbstractList | Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating from the illuminated area of the object; an image sensor configured to capture an image formed by the at least one signal beam collected by the objective lens; and a motion compensatory mechanism operable to compensate for relative motion of the stage module with respect to the objective lens during an image acquisition. The motion compensatory mechanism causes a compensatory motion of one or more of: said objective lens or at least one optical element thereof; said image sensor; and/or an optical element comprised within a detection branch and/or illumination branch of the optical imaging system. |
Author | KONIJNENBERG, ALEXANDER PRASETYA ZIJP, FERRY VERSCHUREN, COEN ADRIANUS PANDEY, NITESH |
Author_xml | – fullname: VERSCHUREN, COEN ADRIANUS – fullname: ZIJP, FERRY – fullname: KONIJNENBERG, ALEXANDER PRASETYA – fullname: PANDEY, NITESH |
BookMark | eNrjYmDJy89L5WQw9U0tychPUUjMA-KCgsSixJLSYoW0_CKFzNzE9My8dAWguuKSxJLM_LzEokqF_KSs1OQSHgbWtMSc4lReKM3NoOjmGuLsoZtakB-fWlyQmJyal1oSHxJuZGBkZGxmYGDuaEyMGgCDmi9S |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | TW202236007A |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_TW202236007A3 |
IEDL.DBID | EVB |
IngestDate | Fri Aug 30 05:42:51 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | Chinese English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_TW202236007A3 |
Notes | Application Number: TW202110144520 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220916&DB=EPODOC&CC=TW&NR=202236007A |
ParticipantIDs | epo_espacenet_TW202236007A |
PublicationCentury | 2000 |
PublicationDate | 20220916 |
PublicationDateYYYYMMDD | 2022-09-16 |
PublicationDate_xml | – month: 09 year: 2022 text: 20220916 day: 16 |
PublicationDecade | 2020 |
PublicationYear | 2022 |
RelatedCompanies | ASML NETHERLANDS B.V |
RelatedCompanies_xml | – name: ASML NETHERLANDS B.V |
Score | 3.554539 |
Snippet | Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING |
Title | Method and apparatus for imaging nonstationary object |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220916&DB=EPODOC&locale=&CC=TW&NR=202236007A |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQSTQ0STU0SjPXNTcDbclJM0rRTUpLs9BNtUgzSjNKNkw2Bx-Z7-tn5hFq4hVhGsHEkAXbCwM-J7QcfDgiMEclA_N7Cbi8LkAMYrmA11YW6ydlAoXy7d1CbF3UoL1jIyNg9Wem5uJk6xrg7-LvrObsbBsSruYXBJYzBp3F7sjMwApqRoPO2XcNcwLtSilArlLcBBnYAoCm5ZUIMTBVZQgzcDrDbl4TZuDwhU54CzOwg1doJhcDBaG5sFiEwdQXfO2zQmIeEBeAD-8uLVYAtj4VMnPBlw4p5IFbfeBhvqJKhfwk0GCLKIOim2uIs4cu0CXxcG_Hh4QjHG0sxsAC1JoqwaBgCWzgpIDO2TNMNDEBdgcS04ABnAJsOBgkA8vdVCNJBinc5kjhk5Rm4AJxQKshDM1kGFhKikpTZYFVbkmSHDisADiehY0 |
link.rule.ids | 230,309,786,891,25594,76906 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8MwDLbGeIwbDBCMV5FQbxU069pxqBBrVxVYtwkVtlvVV8SQ6Kq1E4Jfj2NtjAsccomVKInk-Itjfwa4DFUtVRk3FEMXKTmcJUrEeVtJ25xxFquxQZT5Xl93n7WHcWtcgbdlLgzxhH4QOSJqVIz6XtJ9na-cWDbFVhZX0QS7preOb9ry4nXMGJo_XbY7Znc4sAeWbFmmP5L7TyRrCi72uzVYNwQ7r4BOLx2RlZL_NinODmwMcbas3IXK12sdatay8lodtrzFh3cdNilCMy6wc6GFxR60PCr7LIUZtpzIu-eFhOhTmrxT0SEpI9RHbr7ZpzSNhLNlHy6crm-5Cq4k-Nl24I9Wi24eQBWHpocg3SDASQTPnhpqGj4HQo4HnCBwuI7x3k3ZETT-nqfxn_Acaq7v9YLeff_xGLaFQERGqPoJVMvZPD1F81tGZ3Ru35_liHo |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Method+and+apparatus+for+imaging+nonstationary+object&rft.inventor=VERSCHUREN%2C+COEN+ADRIANUS&rft.inventor=ZIJP%2C+FERRY&rft.inventor=KONIJNENBERG%2C+ALEXANDER+PRASETYA&rft.inventor=PANDEY%2C+NITESH&rft.date=2022-09-16&rft.externalDBID=A&rft.externalDocID=TW202236007A |