Apparatus and system including extraction optics having movable blockers

• Main Authors: CALKINS, ADAM, HOWARTH, JAMES J, BILOIU, COSTEL, KONTOS, ALEXANDER C
• Format: Patent
• Language: Chinese; English
• Published: 01.02.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

Disclosed herein are approaches for adjusting extraction slits of an extraction plate using a set of adjustable beam blockers. In one approach, an ion extraction optics may include an extraction plate including a first opening and a second opening, and a first beam blocker extending over the first o...