Temperature offset and zone control tuning

• Main Authors: ADERHOLD, WOLFGANG R, MUTHUKRISHNAN, SHANKAR, LUCKNER, OLE
• Format: Patent
• Language: Chinese; English
• Published: 01.12.2020
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES

A method for controlling temperature in a thermal processing chamber includes determining temperature sensitivity profiles of one or more heating elements or zones for a substrate based on measurements of the substrate. The method also includes selecting a temperature offset value for each of the on...