Substrate receiving cassette for changing the positions of the shock absorbing materials or corresponding to the shock absorbing materials of different lengths according to the requirements by inserting pad feet into different positioning holes

A substrate receiving cassette comprises a frame unit and a plurality of receiving units disposed in the frame unit. Each of the receiving units includes a support rod defining an installation groove, two pad feet disposed on the support rod at intervals, and a shock absorbing material disposed in t...

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Bibliographic Details
Main Authors SU, PENG-ZHEN, SHI, BO-BIN, HUANG, GUAN-DI
Format Patent
LanguageChinese
English
Published 16.03.2019
Subjects
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