Method of stiction prevention by patterned anti-stiction layer

• Main Authors: TSAI, SHANG-YING, CHANG, KUEI-SUNG, LAI, FEI-LUNG, HSIEH, CHENG-YU
• Format: Patent
• Language: Chinese; English
• Published: 01.02.2019
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The present disclosure relates to a MEMS apparatus with a patterned anti-stiction layer, and an associated method of formation. The MEMS apparatus has a handle substrate defining a first bonding face and a MEMS substrate having a MEMS device and defining a second bonding face. The handle substrate i...