Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system
Methods for operating a substrate processing cluster tool include positioning a substrate storage cassette within a factory interface of the substrate processing cluster tool, wherein the substrate storage cassette defines an interior volume dimensioned and arranged to receive one or more substrates...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
16.09.2017
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Methods for operating a substrate processing cluster tool include positioning a substrate storage cassette within a factory interface of the substrate processing cluster tool, wherein the substrate storage cassette defines an interior volume dimensioned and arranged to receive one or more substrates, and sensing, by execution of stored instructions by a processor operatively associated with a plurality of sensors, at least one of occurrence of a condition of a plurality of conditions within the interior volume or persistence of a condition of the plurality of conditions within the interior volume. Responsive to the sensing, at least one of generating an alert or performing an alternate operation involving the substrate storage cassette. |
---|---|
Bibliography: | Application Number: TW20176103179 |