Workpiece processing method and system

A system and method for processing a workpiece is disclosed. A plasma chamber is used to create a ribbon ion beam, extracted through an extraction aperture. A workpiece is translated proximate the extraction aperture so as to expose different portions of the workpiece to the ribbon ion beam. As the...

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Bibliographic Details
Main Authors EVANS, MORGAN D, OLSON, JOSEPH C, DISTASO, DANIEL, SHERMAN, STEVEN ROBERT, ANGLIN, KEVIN, HAUTALA, JOHN
Format Patent
LanguageChinese
English
Published 16.08.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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