Process for manufacture of solar cell with heterojunction of azoy and silicon and process for promotion of transformation conversion thereof

• Main Authors: WANG, NA-FU, TSAI, YU-ZEN, HSU, FENG-HAO
• Format: Patent
• Language: Chinese; English
• Published: 01.11.2011
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The present invention relates to a process for manufacture of a solar cell with a heterojunction of AZOY and silicon and a process for promotion of transformation conversion thereof, which particularly takes advantage of the direct current magnetron sputtering technique to prepare a ceramic sputtering target containing components of Aluminum and Yttrium and then deposit a AZOY thin film on a glass substrate. After modulation of parameters during the process and analysis of characteristics of AZOY thin film, a set of process parameters for AZOY thin film having optimum photoelectric characteristics can be obtained. Further, the AZOY thin film can be further deposited on a silicon substrate with use of the optimum process parameters, so that it is simple to form a solar cell with a heterojunction of AZOY and silicon. A diluted acid liquid is used to etch the AZOY thin film at different times to change its surface structure for promotion of its transformation conversion.