Device and method for atomising with the aid of a displaceable planar target

The invention relates to a device for atomising material in a vacuum chamber with the aid of a displaceable target device (1) comprising a planar target (2) which can be switched as a cathode and which can be displaced on a plane. The inventive device comprises a stationary target environment (16),...

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Bibliographic Details
Main Authors HAUSWALD, RALF, FUKAREK, WOLFGANG, WILLKOMMEN, UDO
Format Patent
LanguageChinese
English
Published 16.01.2006
Subjects
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