APA (7th ed.) Citation

HEALY, J. J., ADAMS, M. J., & HOWLAND, J. W. H. (2005). Semiconductor substrate surface preparation using high temperature convection heating.

Chicago Style (17th ed.) Citation

HEALY, JR. JAMES, MICHAEL J. ADAMS, and JR. WILLIAM H. HOWLAND. Semiconductor Substrate Surface Preparation Using High Temperature Convection Heating. 2005.

MLA (9th ed.) Citation

HEALY, JR. JAMES, et al. Semiconductor Substrate Surface Preparation Using High Temperature Convection Heating. 2005.