Device manufacturing method, device manufactured thereby and computer programs

To print layers of extended devices, that is devices extending over more than one target portion or die, a projection field is selected to minimize stitching errors. Preferably, the selection of the projection field is based on data characterizing the projection lens to be used and the projection fi...

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Bibliographic Details
Main Authors BRINK, ENNO VAN DEN, MOOSDIJK, MICHAEL JOSEPHUS EVERT VAN DE, SIMON, KLAUS
Format Patent
LanguageChinese
English
Published 16.01.2004
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:To print layers of extended devices, that is devices extending over more than one target portion or die, a projection field is selected to minimize stitching errors. Preferably, the selection of the projection field is based on data characterizing the projection lens to be used and the projection field is selected so as minimize the difference between positional errors in the projected image on opposite sides of the field.
Bibliography:Application Number: TW20030108239