Evaluating method and method for manufacturing exposure apparatus
A pattern formation member where a predetermined pattern is formed is placed on a first surface, a photosensitive body having a physical property concerning color such as the color density variable with the amount of energy of an energy beam applied is placed on a second surface, and the pattern is...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
16.08.2003
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Subjects | |
Online Access | Get full text |
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