Sputtering silicon dielectric films with noble gas mixtures
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| Main Authors | , , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
13.08.1996
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| Edition | 6 |
| Subjects | |
| Online Access | Get full text |
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| Author | ZARRABIAN SOHRAB WOLFE, JESSE D TERRY ROBERT |
|---|---|
| Author_xml | – fullname: TERRY ROBERT – fullname: ZARRABIAN SOHRAB – fullname: WOLFE, JESSE D |
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| Notes | Application Number: SG19950000930 |
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| RelatedCompanies | THE BOC GROUP, INC |
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| SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| Title | Sputtering silicon dielectric films with noble gas mixtures |
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