FREQUENCY TRIPLING USING SPACER MASK HAVING INTERPOSED REGIONS
Frequency Tripling Using Spacer Mask Having Interposed Regions A method for fabricating a semiconductor mask is described. A semiconductor stack having a sacrificial mask comprised of a series of lines is first provided. A spacer mask having spacer lines adjacent to the sidewalls of the series of li...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
31.12.2008
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Subjects | |
Online Access | Get full text |
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