LIFT PIN ASSEMBLY

LIFT PIN ASSEMBLY Embodiments of lift pin assemblies are provided herein. In some embodiments, a lift pin assembly includes an elongate base formed of a first material and having a first feature formed in a distal end of the base to interface with and removably support a tip; and a tip formed of a s...

Full description

Saved in:
Bibliographic Details
Main Authors KAMATH, Aravind Miyar, PURATHE, Vinod Konda, TSAI, Cheng-Hsiung Matthew, KOPPA, Manjunatha, RAVI, Jallepally, CHIA, Bonnie T
Format Patent
LanguageEnglish
Published 30.01.2019
Online AccessGet full text

Cover

Loading…