CONTROL OF IMPEDANCE OF RF RETURN PATH

• Main Authors: Luc Albarede, Ken Lucchesi, Alexei Marakhtanov, Rajinder Dhindsa
• Format: Patent
• Language: English
• Published: 30.10.2018

CONTROLOF IMPEDANCE OF RF RETURN PATH A system for controlling an impedance of a radio frequency (RF) return path includes a matchbox further including a match circuitry. The system further includes an RF generator coupled to the matchbox to supply an RF supply signal to the matchbox via a first por...