Substratgenomgående vior
Method of making through-substrate-vias in glass substrates includes providing a first substrate on which a plurality of needles protruding vertically from the substrate are made; providing a second substrate made of glass; locating the substrates adjacent each other such that the needles on the fir...
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Main Authors | , |
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Format | Patent |
Language | Swedish |
Published |
02.05.2014
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Subjects | |
Online Access | Get full text |
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