MULTIPLICATIVE MICROELECTRONIC PRESSURE TRANSDUCER
FIELD: measurement technology. ^ SUBSTANCE: device can be used for measuring non-electric parameters. Multiplicative microelectronic pressure transducer has semiconductor chip with flexible member made in form of a protrusion on the top of chip, at least one sensitive element formed in protrusion, c...
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Main Authors | , , , , , |
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Format | Patent |
Language | English Russian |
Published |
27.02.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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