MULTIPLICATIVE MICROELECTRONIC PRESSURE TRANSDUCER

• Main Authors: SVINOLUPOV JU.G, ROMAS' L.M, IVANOV E.V, BYCHKOV V.V, KRIVOROTOV N.P, IZAAK T.I
• Format: Patent
• Language: English; Russian
• Published: 27.02.2005
• Edition: 7
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

FIELD: measurement technology. ^ SUBSTANCE: device can be used for measuring non-electric parameters. Multiplicative microelectronic pressure transducer has semiconductor chip with flexible member made in form of a protrusion on the top of chip, at least one sensitive element formed in protrusion, c...