PROCESS OF MEASUREMENT AND TESTING OF PARAMETERS OF LAYERS OF MICROCIRCUITS

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Bibliographic Details
Main Authors GRISHACHEV VLADIMIR V, AKTSIPETROV OLEG A, DENISOV VIKTOR I
Format Patent
LanguageEnglish
Published 30.01.1994
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Author GRISHACHEV VLADIMIR V
AKTSIPETROV OLEG A
DENISOV VIKTOR I
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title PROCESS OF MEASUREMENT AND TESTING OF PARAMETERS OF LAYERS OF MICROCIRCUITS
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