FEED SYSTEM FOR CRYSTAL PULLING SYSTEMS
A system for growing silicon crystal structures includes a housing (102) defining a growth chamber (104) and a feed system (112) connected to the housing for delivering silicon particles to the growth chamber. The feed system includes a container (114) for holding the silicon particles. The containe...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
24.01.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!