TARGET PREPARATION

A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating chamber to a predetermined process pressure, starting a coating source, which comprises a target as a material source, whereby particles are a...

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Bibliographic Details
Main Authors KURAPOV, DENIS, KRASSNITZER, SIEGFRIED
Format Patent
LanguageEnglish
Published 20.10.2020
Online AccessGet full text

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