TARGET PREPARATION
A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating chamber to a predetermined process pressure, starting a coating source, which comprises a target as a material source, whereby particles are a...
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| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
20.10.2020
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| Online Access | Get full text |
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| Abstract | A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating chamber to a predetermined process pressure, starting a coating source, which comprises a target as a material source, whereby particles are accelerated from the surface of the target toward substrates, characterized in that until the target has been conditioned a shield is provided between the target surface and the substrate, wherein meanwhile the substrates to be coated are at least partially subjected to a pretreatment. |
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| AbstractList | A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating chamber to a predetermined process pressure, starting a coating source, which comprises a target as a material source, whereby particles are accelerated from the surface of the target toward substrates, characterized in that until the target has been conditioned a shield is provided between the target surface and the substrate, wherein meanwhile the substrates to be coated are at least partially subjected to a pretreatment. |
| Author | KURAPOV, DENIS KRASSNITZER, SIEGFRIED |
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| Notes | Application Number: MY2015PI704822 |
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| RelatedCompanies | Oerlikon Surface Solutions AG, Pfaeffikon OERLIKON SURFACE SOLUTIONS AG, TRUBBACH |
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| Snippet | A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating... |
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| Title | TARGET PREPARATION |
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