TARGET PREPARATION

A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating chamber to a predetermined process pressure, starting a coating source, which comprises a target as a material source, whereby particles are a...

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Bibliographic Details
Main Authors KURAPOV, DENIS, KRASSNITZER, SIEGFRIED
Format Patent
LanguageEnglish
Published 20.10.2020
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Summary:A method for coating workpieces includes the following steps: charging a coating chamber with the workpieces to be coated; closing and evacuating the coating chamber to a predetermined process pressure, starting a coating source, which comprises a target as a material source, whereby particles are accelerated from the surface of the target toward substrates, characterized in that until the target has been conditioned a shield is provided between the target surface and the substrate, wherein meanwhile the substrates to be coated are at least partially subjected to a pretreatment.
Bibliography:Application Number: MY2015PI704822