PROCESS FOR PRODUCING POLISHING LIQUID COMPOSITION

PROVIDED IS A PROCESS FOR PRODUCING A POLISHING LIQUID COMPOSITION WITH WHICH IT IS POSSIBLE TO GIVE A POLISHED WORK THAT HAS A REDUCED SURFACE ROUGHNESS AND A REDUCED AMOUNT OF PARTICLES. THE PROCESS FOR PRODUCING A POLISHING LIQUID COMPOSITION INVOLVES A STEP IN WHICH A RAW SILICA DISPERSION CONTA...

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Bibliographic Details
Main Authors SATO, Kanji, YONEDA, YASUHIRO, OSHIMA, Yoshiaki, TAIRA, Koji
Format Patent
LanguageEnglish
Published 15.03.2017
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Summary:PROVIDED IS A PROCESS FOR PRODUCING A POLISHING LIQUID COMPOSITION WITH WHICH IT IS POSSIBLE TO GIVE A POLISHED WORK THAT HAS A REDUCED SURFACE ROUGHNESS AND A REDUCED AMOUNT OF PARTICLES. THE PROCESS FOR PRODUCING A POLISHING LIQUID COMPOSITION INVOLVES A STEP IN WHICH A RAW SILICA DISPERSION CONTAINING COLLOIDAL SILICA HAVING AN AVERAGE PRIMARY-PARTICLE DIAMETER OF 1-100 NM IS FILTERED THROUGH A FILTER INCLUDING A FILTER AID, THE FILTER AID HAVING AN AVERAGE PORE DIAMETER, AS MEASURED BY THE MERCURY INTRUSION METHOD, OF 0.1-3.5 µM.
Bibliography:Application Number: MY2013PI00469