COPPER CONDUCTOR FILM AND MANUFACTURING METHOD THEREOF, CONDUCTIVE SUBSTRATE AND MANUFACTURING METHOD THEREOF, COPPER CONDUCTOR WIRING AND MANUFACTURING METHOD THEREOF AND TREATMENT SOLUTION

• Main Authors: YAMAMOTO, KAZUNORI, MACHII, YOUICHI, NAKAO, HIDEO, YOKOZAWA, SHUNYA, MASUDA, KATSUYUKI, KUMASHIRO, YASUSHI, EJIRI, YOSHINORI
• Format: Patent
• Language: English
• Published: 28.02.2017
• Subjects: BASIC ELECTRIC ELEMENTS; CABLES; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONDUCTORS; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INSULATORS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; METALLURGY; PRINTED CIRCUITS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROVIDED ARE A COPPER CONDUCTOR FILM AND MANUFACTURING METHOD THEREOF, AND PATTERNED COPPER CONDUCTOR WIRING, WHICH HAVE SUPERIOR CONDUCTIVITY AND WIRING PATTERN FORMATION, AND WITH WHICH THERE IS NO DECREASE IN INSULATION BETWEEN CIRCUITS, EVEN AT NARROW WIRING WIDTHS AND NARROW INTER-WIRING SPACING. DISCLOSED ARE A COPPER CONDUCTOR FILM AND MANUFACTURING METHOD THEREOF IN WHICH A COPPER-BASED PARTICLE-CONTAINING LAYER, WHICH CONTAINS BOTH A METAL (14) HAVING CATALYTIC ACTIVITY TOWARD A REDUCING AGENT AND COPPER OXIDE (12), IS TREATED USING A TREATMENT SOLUTION THAT CONTAINS A REAGENT THAT IONIZES OR COMPLEXES COPPER OXIDE (12) AND A REDUCING AGENT THAT REDUCES COPPER IONS OR COPPER COMPLEX TO FORM METALLIC COPPER (16) IN A SINGLE SOLUTION, AND PATTERNED COPPER CONDUCTOR WIRING THAT IS OBTAINED BY PATTERNING A COPPER-BASED PARTICLE-CONTAINING LAYER USING PRINTING AND BY SAID PATTERNED PARTICLE-CONTAINING LAYER BEING TREATED BY A TREATMENT METHOD USING A SOLUTION THAT CONTAINS BOTH A REAGENT THAT IONIZES OR COMPLEXES COPPER OXIDE (12) AND A REDUCING AGENT THAT REDUCES COPPER IONS OR COPPER COMPLEXES TO FORM METALLIC COPPER (16) IN A SINGLE SOLUTION.