METHOD AND SYSTEM FOR DETERMINING SURFACE PROFILE INFORMATION

A flying spot system uses a laser beam scanned in X and Y directions to provide surface profile information. The beam is applied to a surface under test and the time interval between the beginning of the sweep and the appearace of the beam image through an aperture is determined. This time interval...

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Bibliographic Details
Main Authors THOMAS, BRADLEY S, PENNEY, CARL M, ROY, ROBERT N
Format Patent
LanguageEnglish
Korean
Published 07.06.1995
Edition6
Subjects
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Summary:A flying spot system uses a laser beam scanned in X and Y directions to provide surface profile information. The beam is applied to a surface under test and the time interval between the beginning of the sweep and the appearace of the beam image through an aperture is determined. This time interval is indicative of the beam angle which, through optical triangulation, is used to determine the surface height. A scan-descan arrangement and a plate with a small aperture are used to isolate a light detector from background light.
Bibliography:Application Number: KR19860004282