코팅 소스, 코팅 설비, 및 기판 코팅 방법

• Main Authors: BORODIN SERGIY, LUDWIG ANDREAS
• Format: Patent
• Language: Korean
• Published: 19.08.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

본 발명은 코팅 설비용 코팅 소스, 이러한 코팅 소스를 갖는 코팅 설비, 및 이러한 코팅 소스를 사용하여 기판을 코팅하는 방법에 관한 것이다. The present invention relates to a coating source for a coating installation, to a coating installation having such a coating source, and to a method for coating substrates using such a coating source....