ACTUATOR TILT CONTROL DEVIDE POSITIONING DEVICE PROCESSING DEVICE AND DEVICE MANUFACTURING METHOD

• Main Authors: NAKAJIMA RYUTA, YOSHIDA TATSUYA
• Format: Patent
• Language: English; Korean
• Published: 02.07.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERATION; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

구동의 원활성을 높일 수 있는 액추에이터 등을 제공한다. 액추에이터(3)는, 고정부(5)와, 가동부(6)와, 가동부(6)를 고정부(5)에 대하여 구동방향(Z축방향)을 따라 구동하는 구동부(코일(54) 및 영구자석(65))와, 고정부(5)에 있어서 구동방향으로 뻗고, 당해 구동방향을 따른 구동부에 의한 가동부(6)의 구동을 안내하는 안내부(52)와, 가동부(6)와 안내부(52)의 사이에 기체를 공급하는 기체공급부(55)를 구비하며, 안내부(52)는, 구동방향시(Z축방향시)에 있어서, 가동부(6)의 중앙에 위치한다. 구동부는, 구동방향시에 있어서, 안내부(52)를 환상으로 둘러싼다. An actuator includes: a fixed part; a movable part; a drive unit that drives the movable part relative to the fixed part along a driving direction; a guide portion that extends in the driving direction in the fixed part and guides driving of the movable part by the drive unit along the driving direction; and a gas supply portion that supplies gas between the movable part and the guide portion, in which the guide portion is located at a center of the movable part when viewed in the driving direction.