샘플 측정 방법 및 그 방법을 실시하는 현미경

본 발명은 현미경으로 샘플(100)을 측정하는 방법(200)에 관한 것이며, 이 방법은 샘플(100)의 기울기(131, 132)를 측정하는 단계(S210), 기울기(131, 132)에 기초하여 샘플(100)의 배향을 수정하는 단계(S220), 샘플을 스캐닝하는 단계(S230)를 포함한다. The present invention relates to a method for measuring a sample with a microscope, the method comprising the steps of: measuring a tilt o...

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Main Authors NEUMANN JENS TIMO, AVISHAI AMIR, KORB THOMAS, KLOCHKOV DMITRY, FOCA EUGEN, LEE KEUMSIL
Format Patent
LanguageKorean
Published 20.06.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Abstract 본 발명은 현미경으로 샘플(100)을 측정하는 방법(200)에 관한 것이며, 이 방법은 샘플(100)의 기울기(131, 132)를 측정하는 단계(S210), 기울기(131, 132)에 기초하여 샘플(100)의 배향을 수정하는 단계(S220), 샘플을 스캐닝하는 단계(S230)를 포함한다. The present invention relates to a method for measuring a sample with a microscope, the method comprising the steps of: measuring a tilt of the sample, correcting an orientation of the sample based on the tilt, and scanning the sample.
AbstractList 본 발명은 현미경으로 샘플(100)을 측정하는 방법(200)에 관한 것이며, 이 방법은 샘플(100)의 기울기(131, 132)를 측정하는 단계(S210), 기울기(131, 132)에 기초하여 샘플(100)의 배향을 수정하는 단계(S220), 샘플을 스캐닝하는 단계(S230)를 포함한다. The present invention relates to a method for measuring a sample with a microscope, the method comprising the steps of: measuring a tilt of the sample, correcting an orientation of the sample based on the tilt, and scanning the sample.
Author FOCA EUGEN
NEUMANN JENS TIMO
AVISHAI AMIR
KLOCHKOV DMITRY
LEE KEUMSIL
KORB THOMAS
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Snippet 본 발명은 현미경으로 샘플(100)을 측정하는 방법(200)에 관한 것이며, 이 방법은 샘플(100)의 기울기(131, 132)를 측정하는 단계(S210), 기울기(131, 132)에 기초하여 샘플(100)의 배향을 수정하는 단계(S220), 샘플을 스캐닝하는 단계(S230)를...
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Title 샘플 측정 방법 및 그 방법을 실시하는 현미경
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