금속 타겟으로부터 PVD에 의해 제조된 Al-풍부한 AlCrN 코팅층

• Main Authors: KRASSNITZER SIEGFRIED, EBERSOLD MARIJANA MIONIC
• Format: Patent
• Language: Korean
• Published: 02.06.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

본 발명은 코팅층 및 이를 제조하기 위한 방법에 관한 것으로, 코팅층은 Al, Cr 및 N을 주성분으로 포함하며, 공식 (AlaCrb)xOyCzNq 에 따른 이들 원소에 대한 원자 백분율의 화학 원소 조성을 가지며, a 및 b는 각각 층의 원소 조성 계산을 위해 Al 및 Cr만을 고려한 원자비율의 알루미늄 및 크롬 농도이며, 여기서 a+b=1 이고 0 ≠ a ≥ 0.7이고 0 ≠ b ≥ 0.2이 이고, x는 Al 농도와 Cr 농도의 합이고, y,z 및 q는 각각 층의 원소 조성 계산을 위해 Al, Cr, O, C 및 N 만을 고려한 원자비율의 산소, 탄소 및 질소 농도인데, 여기서 x+y+z+q　=　1 및 0.45≤　x≤0.55, 0　≤y≤0.25, 0≤z≤0.25 이며, 90%이상의 fcc 입방상을 나타내고, 2.5GPa 이상의 압축응력, 바람직하게는 2.5GPa 및 6GPa 사이의 압축 응력을 나타낸다. A coating layer and a method for producing thereof, wherein the coating layer includes Al, Cr and N as main components according to formula (AlaCrb)xOyCzNq, where a and b are respectively the concentration of aluminium and chromium in atomic ratio considering only Al and Cr for the calculation of the element composition in the layer, whereby a+b=1 and 0≠a≥0.7 and 0≠b≥0.2, and where x is the sum of the concentration of Al and the concentration of Cr, and y, z and q are the concentration of oxygen, carbon and nitrogen respectively in atomic ratio considering only Al, Cr, O, C and N for the calculation of the element composition in the layer, whereby x+y+z+q=1 and 0.45≤x≤0.55, 0≤y≤0.25, 0≤z≤0.25, and wherein the coating layer exhibits 90% or more of fcc cubic phase, and compressive stress of 2.5 GPa or more, preferably between 2.5 GPa and 6 GPa.