The manufacturing method for a visible-blind UV sensor based on the wide bandgap and high stability metal-organic framework and a visible-blind UV sensor using the same

The present invention relates to a method for manufacturing a photodiode visible-blind ultraviolet sensor, wherein a zirconium benzenedicarboxylate metal-organic framework (ZrBDC MOF) with a wideband gap and high stability is synthesized into a film having a desired thickness and uniformity through...

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Bibliographic Details
Main Authors HUR JAEHYUN, MANH HOANG TRAN
Format Patent
LanguageEnglish
Korean
Published 31.01.2023
Subjects
COLORIMETRY
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:The present invention relates to a method for manufacturing a photodiode visible-blind ultraviolet sensor, wherein a zirconium benzenedicarboxylate metal-organic framework (ZrBDC MOF) with a wideband gap and high stability is synthesized into a film having a desired thickness and uniformity through a layer-by-layer spin coating process, using this, a high-performance photodiode visible-blind ultraviolet sensor is manufactured. 본 발명은 넓은 밴드갭과 높은 안정성을 가진 zirconium benzenedicarboxylate 금속유기골격체(ZrBDC MOF)를 다층(layer-by-layer) 스핀코팅 공정을 통하여 원하는 두께와 균일도를 갖는 막으로 합성하고, 이를 이용하여 고성능 광다이오드 가시광 차단(visible-blind) 자외선 센서를 제조하는 방법에 관한 것이다.
Bibliography:Application Number: KR20210097172