DATA PROCESSING METHOD AND DATA COMPARING METHOD

Disclosed is a method for performing a process of the data generated in a substrate treatment process. The method may comprise: a step of separating the data per process step; and a step of converting the pieces of data separated per process step into the same size. According to one embodiment, the...

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Bibliographic Details
Main Authors JEON JAE YEONG, KOO KI SUNG
Format Patent
LanguageEnglish
Korean
Published 09.12.2022
Subjects
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
PHYSICS
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Summary:Disclosed is a method for performing a process of the data generated in a substrate treatment process. The method may comprise: a step of separating the data per process step; and a step of converting the pieces of data separated per process step into the same size. According to one embodiment, the step of converting the pieces of data separated per process step into the same size may perform conversion using a 1D convolution. Therefore, the present invention can have an effect of solving a problem that learning using deep learning cannot be performed. 기판 처리 과정에서 발생하는 데이터의 처리를 수행하는 방법이 개시된다. 상기 방법은, 상기 데이터를 공정 스텝별로 분리하는 단계; 및 상기 공정 스텝별로 분리한 데이터들을 동일한 사이즈로 변환하는 단계;를 포함할 수 있다. 일 예시에 따르면, 상기 동일한 사이즈로 변환하는 단계는, 1D 컨벌루션(convolution)을 이용하여 변환을 수행할 수 있다.
Bibliography:Application Number: KR20210071251