EUV 리소그라피용 마스크를 검사하기 위한 시스템 및 방법
머신 러닝을 기초로 한 잠재적인 마스크 결함의 사전-분류가 EUV 리소그라피용 마스크의 검사 동안 제공된다. A pre-classification of potential mask defects on the basis of machine learning is provided during the inspection of a mask for EUV lithography.
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Format | Patent |
Language | Korean |
Published |
08.11.2022
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Subjects | |
Online Access | Get full text |
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Abstract | 머신 러닝을 기초로 한 잠재적인 마스크 결함의 사전-분류가 EUV 리소그라피용 마스크의 검사 동안 제공된다.
A pre-classification of potential mask defects on the basis of machine learning is provided during the inspection of a mask for EUV lithography. |
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AbstractList | 머신 러닝을 기초로 한 잠재적인 마스크 결함의 사전-분류가 EUV 리소그라피용 마스크의 검사 동안 제공된다.
A pre-classification of potential mask defects on the basis of machine learning is provided during the inspection of a mask for EUV lithography. |
Author | CAPELLI RENZO |
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Snippet | 머신 러닝을 기초로 한 잠재적인 마스크 결함의 사전-분류가 EUV 리소그라피용 마스크의 검사 동안 제공된다.
A pre-classification of potential mask defects on the basis of machine learning is provided during... |
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Title | EUV 리소그라피용 마스크를 검사하기 위한 시스템 및 방법 |
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