Transferring unit and System for manufacturing semiconductor with the unit

According to the present invention, provided is a mobile unit for semiconductor equipment. The moving unit for semiconductor equipment comprises: a wheel; a wheel frame provided on both sides so that the wheel is pivotally supported; a fixing bracket fixed to a chamber case; a rotation control unit...

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Bibliographic Details
Main Authors HWANG MUN HYEOK, KO HONG SEOK
Format Patent
LanguageEnglish
Korean
Published 18.05.2022
Subjects
AXLES FOR WHEELS OR CASTORS
BASIC ELECTRIC ELEMENTS
CASTORS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INCREASING WHEEL ADHESION
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
TRANSPORTING
VEHICLE WHEELS
VEHICLES IN GENERAL
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Summary:According to the present invention, provided is a mobile unit for semiconductor equipment. The moving unit for semiconductor equipment comprises: a wheel; a wheel frame provided on both sides so that the wheel is pivotally supported; a fixing bracket fixed to a chamber case; a rotation control unit coupled to an upper surface of the wheel frame by a bearing and having a bolt screwed to the fixing bracket which is shaft-fixed at the center of the upper surface; and a deflection prevention device inserted and coupled between the fixing bracket and the rotation control device. 본 발명은 반도체 장비용 이동 유닛을 제공한다. 반도체 장비용 이동 유닛은 바퀴; 양측면에 결쳐 바퀴가 축지지되도록 제공되는 바퀴 프레임; 챔버 케이스에 고정되는 고정 브라켓; 상기 바퀴 프레임의 상부면과 베어링에 의해 베어링 결합되고, 상부면 중앙에는 상기 고정 브라켓에 나사 결합되는 볼트가 축고정되는 회전 조작구; 및 상기 고정 브라켓과 상기 회전 조작구 사이에 삽입 결합되는 처짐 방지구를 포함할 수 있다.
Bibliography:Application Number: KR20200150237