3 DETERMINING THREE DIMENSIONAL INFORMATION
A method, non-transitory computer readable medium, and system for determining three-dimensional (3D) information of structural elements of a substrate are provided. The method includes the steps of: generating or receiving one or more properties of structural elements of a substrate; retrieving a mo...
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Main Authors | , |
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Format | Patent |
Language | English Korean |
Published |
28.09.2021
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Subjects | |
Online Access | Get full text |
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Summary: | A method, non-transitory computer readable medium, and system for determining three-dimensional (3D) information of structural elements of a substrate are provided. The method includes the steps of: generating or receiving one or more properties of structural elements of a substrate; retrieving a model; predicting 3D information on the structural elements of the substrate; and responding to a discovery failure of the related model.
기판의 구조적 요소들의 3차원(3D) 정보를 결정하기 위한 방법, 비-일시적 컴퓨터 판독가능한 매체 및 시스템이 제공된다. |
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Bibliography: | Application Number: KR20210034550 |