3 DETERMINING THREE DIMENSIONAL INFORMATION

A method, non-transitory computer readable medium, and system for determining three-dimensional (3D) information of structural elements of a substrate are provided. The method includes the steps of: generating or receiving one or more properties of structural elements of a substrate; retrieving a mo...

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Bibliographic Details
Main Authors BISTRITZER RAFAEL, LEVANT ANNA
Format Patent
LanguageEnglish
Korean
Published 28.09.2021
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Summary:A method, non-transitory computer readable medium, and system for determining three-dimensional (3D) information of structural elements of a substrate are provided. The method includes the steps of: generating or receiving one or more properties of structural elements of a substrate; retrieving a model; predicting 3D information on the structural elements of the substrate; and responding to a discovery failure of the related model. 기판의 구조적 요소들의 3차원(3D) 정보를 결정하기 위한 방법, 비-일시적 컴퓨터 판독가능한 매체 및 시스템이 제공된다.
Bibliography:Application Number: KR20210034550