플라즈마 처리 장치를 위한 전압 파형 발생기

• Main Authors: VAN GENNIP WOUTER JOHAN HENDRIK, DRIESSEN ANTONIUS WILHELMUS HENDRICUS JOHANNES
• Format: Patent
• Language: Korean
• Published: 19.07.2021
• Subjects: APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONTROL OR REGULATION THEREOF; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; GENERATION; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

플라즈마 처리 장치는 플라즈마를 발생시키는 수단, 처리된 기판을 지지하는 처리 플랫폼, 처리 플랫폼에 전기적으로 연결된 출력을 포함하는 전압 파형 발생기를 포함한다. 전압 파형 발생기는 병렬로 배치되고 출력에 연결된 복수의 제1 벅 변환기들을 포함하고, 제1 벅 변환기들은 능동 스위칭 가능 반도체 스위치들을 포함하고, 전압 파형 발생기는 펄스 폭 변조 신호들을 통해 능동 스위칭 가능 반도체 스위치들을 동작시키도록 구성된 제어 유닛을 포함한다. 제어 유닛은 인터리빙 방식으로 복수의 제1 벅 변화기들을 동작시키도록 구성된다. A plasma processing apparatus may include a mechanism for generating a plasma, a processing platform for supporting a substrate to be processed, and a voltage waveform generator having an output electrically coupled to the processing platform. The voltage waveform generator includes a plurality of first buck converters arranged in parallel and coupled to the output. The first buck converters include actively switchable semiconductor switches. A control unit is configured to operate the actively switchable semiconductor switches through pulse width modulation signals, and the control unit is configured to operate the plurality of first buck converters in an interleaved manner.