변위 확대 기구, 연마 장치, 액츄에이터, 디스펜서 및 에어밸브

• Main Authors: CHEE SZE KEAT, YANO TAKESHI, YANO AKIO
• Format: Patent
• Language: Korean
• Published: 09.03.2020
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GENERATION; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TRANSPORTING

변위 확대 기구는 기반으로 되는 베이스부와, 베이스부의 한쪽측의 면에 마련된 제 1 부착부 및 제 2 부착부와, 제 1 부착부 및 제 2 부착부에 각각 그 일단이 부착되는 제 1 압전 소자 및 제 2 압전 소자와, 제 1 압전 소자 및 제 2 압전 소자의 타단에 접속되고, 압전 소자의 신축에 의해 변위를 발생시키는 작용부와, 제 1 압전 소자와 제 2 압전 소자 사이의 중앙에 배치되고, 작용부와 베이스부를 연결하고, 제 1 압전 소자 및 제 2 압전 소자보다 높은 영률을 갖는 재질로 이루어지는 연결부를 구비한다. A displacement magnifying mechanism includes a base portion serving as a substrate; a first attachment portion and a second attachment portion which are provided on a surface on one side of the base portion; a first piezoelectric element and a second piezoelectric element of which one ends are attached to the first attachment portion and the second attachment portion; an operating portion which is connected to the other ends of the first piezoelectric element and the second piezoelectric element and generates a displacement due to expansion and contraction of the piezoelectric element; and a link portion which is disposed at the center between the first piezoelectric element and the second piezoelectric element, links the operating portion and the base portion, and is made of a material having a higher Young's modulus than that of the first piezoelectric element and the second piezoelectric element.