ION BEAM APPARATUS

An objective of the present invention is to provide an ion beam apparatus capable of reducing damage to a sample while switching observation and processing in a short time. As a means to solve the objective of the present invention, the ion beam apparatus switches between an operation mode for irrad...

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Bibliographic Details
Main Authors SHICHI HIROYASU, MATSUBARA SHINICHI, KAWANAMI YOSHIMI
Format Patent
LanguageEnglish
Korean
Published 19.02.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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